Lithography Resolution Calculator
Enter optical parameters and process factors to calculate R = k1·λ/(NA·n) and DOF = k2·λ·n/NA². These are simplified estimates, not a manufacturing feasibility guarantee.
A QUICK WALKTHROUGH
How to use this tool
- Enter wavelength, numerical aperture, refractive index, and process factors k1 and k2.
- Calculate the estimated resolution and depth of focus.
- Use the formulas as an educational estimate and validate any real process separately.
Formulas
Resolution R = k1·λ/(NA·n). Depth of focus DOF = k2·λ·n/NA². Wavelength and outputs use the same length unit.
Process factors are inputs
k1 and k2 represent user supplied process factors. Their values depend on the process and assumptions; this calculator does not choose or validate them.
Scope and limitations
This is a simplified arithmetic estimate. It is not a manufacturing feasibility guarantee and does not model a complete scanner, resist, mask, illumination, focus control, overlay, defect, yield, or safety process.
GOOD TO KNOW
Common questions
What do k1 and k2 mean?
They are user supplied process factors used in the two formulas. Choose values from your own documented assumptions or process model.
Can the result prove a process will work?
No. The results are simplified estimates and are not a manufacturing feasibility guarantee.